ASTM E986-04(2024) - Standard Practice for Scanning Electron Microscope Beam Size Characterization

Introduction: The Standard Practice for Characterizing Beam Size of Scanning Electron Microscopes (SEMs), designated as ASTM E986-04(2024), published by the American Society for Testing and Materials (ASTM) on April 1, 2024, is a comprehensive guideline designed to ensure uniformity and consistency in measuring beam sizes across various scanning electron microscopy applications. This standard practice provides detailed procedures for evaluating SEM beam sizes using established methodologies that account for operational parameters such as accelerating voltage, current density, and detector configuration. By adhering to ASTM E986-04(2024), researchers and manufacturers can achieve reliable and reproducible results when assessing the performance of their scanning electron microscopes. This practice is particularly beneficial in quality control processes, material analysis, and the development of advanced materials where precise beam characterization is critical.

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ASTM E986-04(2024) history

2024 ASTM E986-04(2024) Standard Practice for Scanning Electron Microscope Beam Size Characterization
2017 ASTM E986-04(2017) Standard Practice for Scanning Electron Microscope Beam Size Characterization
2004 ASTM E986-04(2010) Standard Practice for Scanning Electron Microscope Beam Size Characterization
2004 ASTM E986-04 Standard Practice for Scanning Electron Microscope Beam Size Characterization
1997 ASTM E986-97 Standard Practice for Scanning Electron Microscope Beam Size Characterization