GB/T 17359-2023
Microbeam analysis of elements with atomic number not less than 11 and energy spectrometry for quantitative analysis (English Version)

Standard No.

GB/T 17359-2023

Language

Chinese, Available in English version

Release Date

2023

Published By

General Administration of Quality Supervision, Inspection and Quarantine of the People‘s Republic of China

Lastest

GB/T 17359-2023

Replace

GB/T 17359-2012

Scope

This document describes how to use an energy spectrometer mounted on a scanning electron microscope (CSEM) or electron probe (CEPMA) to perform quantitative analysis of specific points or areas of a sample. Quantitative analysis refers to the expression of the content of an element in mass fraction (percentage). Correct identification of all elements in the sample is an integral part of quantitative analysis, so this document also covers this aspect. This document describes various energy spectrometry quantitative analysis methods that are applicable to the quantitative analysis of elements with atomic number Z ≥ 10 with mass fractions greater than 1% using reference materials or "no standard" procedures. At the same time, this document also provides information on the analysis of light elements with atomic number less than 11. Note: When there are no heavy subpeaks and the corresponding characteristic X-rays are strongly excited, the energy spectrometer can also measure elements with mass fractions of 0.1%. This document is mainly used for quantitative analysis of samples with flat surfaces. The basic method is also applicable to the analysis of samples with uneven surfaces, but it will introduce additional uncertainties. There is currently no recognized accurate energy spectrometry (EDS) quantitative analysis method for light elements. The following are several EDS methods commonly used for light element analysis: a) Measure peak areas and compare peak intensities. For the reasons given in Appendix A, the uncertainty of the results for light element analysis is usually greater than for heavy element analysis. b) When the light element in the sample is known to be stoichiometrically combined with the heavy element (Z ≥ 10), the concentration of the light element can be determined by the relative concentration ratios of the other elements. This method is often used for oxygen determination in silicate mineral samples. c) The concentration is calculated by difference, that is, the total percentage of the element that can be analyzed is subtracted from 100% to obtain the percentage of the light element. This method can only be applied under conditions of good beam stability and at least one reference sample is measured separately, and it requires accurate determination of the other elements in the sample. Appendix A summarizes the problems of quantitative analysis of light elements in the presence of heavy elements. If an energy spectrometer and a wave spectrometer (CWDS) are installed on the instrument, WDS can be used to overcome the problem of overlapping low-energy spectral peaks in EDS analysis. However, many other problems are common to both techniques.

GB/T 17359-2023 Referenced Document

• GB/T 17359 Microbeam analysis of elements with atomic number not less than 11 and energy spectrometry for quantitative analysis
• GB/T 20726 Microbeam analysis.Selected instrumental performance parameters for the specification and checking of energy dispersive X-ray spectrometers for use in electron probe microanalysis
• GB/T 27025 General requirements for the competence of testing and calibration laboratories
• GB/T 27788 Microbeam analysis—Scanning electron microscopy—Guidelines for calibrating image magnification
• GB/T 30705 Microbeam analysis.Electron probe microanalysis.Guidelines for the determination of experimental parameters for wavelength dispersive spectroscopy

GB/T 17359-2023 history

• 2023 GB/T 17359-2023 Microbeam analysis of elements with atomic number not less than 11 and energy spectrometry for quantitative analysis
• 2012 GB/T 17359-2012 Microbeam analysis.Quantitative analysis using energy dispersive spectrometry
• 1998 GB/T 17359-1998 General specification of X-ray EDS quantitative analysis for EPMA and SEM