DIN 32567-3 E:2012
Draft Document - Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
- Standard No.
- DIN 32567-3 E:2012
- Release Date
- 2012
- Published By
- German Institute for Standardization
- Status
- Replace By
- DIN 32567-3 E:2012-07
- Lastest
- DIN 32567-3:2014-10
DIN 32567-3 E:2012 history
- 2014 DIN 32567-3:2014-10 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
- 2014 DIN 32567-3:2014 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
- 2012 DIN 32567-3 E:2012-07 Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
- 2012 DIN 32567-3 E:2012 Draft Document - Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices