General specification for MEMS flow sensors
1Key Takeaways
This document specifies general requirements and quality assurance provisions for MEMS flow sensors (hereinafter referred to as sensors). It applies to MEMS gas flow sensors manufactured using MEMS technology directly on semiconductor material and integrated with ASIC conditioning circuits.
2Expert Interpretation
This article provides a detailed interpretation of SJ/T 12262-2026 'General Specification for MEMS Flow Sensors', covering scope of application, technical requirements, inspection methods, etc., to help readers quickly understand the core content of the standard.
Standard Overview
SJ/T 12262-2026 'General Specification for MEMS Flow Sensors' is an electronic industry standard issued by the Ministry of Industry and Information Technology of the People's Republic of China, aiming to unify the general technical requirements and quality assurance regulations for MEMS flow sensors. This standard applies to MEMS gas flow sensors developed and manufactured using MEMS technology directly on semiconductor materials and integrated with ASIC conditioning circuits, providing a comprehensive basis for the design, manufacturing, inspection, and delivery of related products.
Detailed Technical Requirements
The standard sets clear requirements from multiple dimensions: regarding design structure, the sensor must include a housing, core sensing element, conditioning circuit, and electrical interface; materials must withstand common industrial environments and be non-toxic and harmless; appearance quality requires no dents, scratches, deformation, or contamination, with clear and complete markings; dimensions and electrical connections must comply with relevant detailed specifications. Operating ranges include voltage, temperature (e.g., -55°C to 150°C), and measurement range, with specific values determined by detailed specifications. Electrical characteristics cover operating current, flow detection error (obtained by comparison with standard specimens), response time, pressure loss, overvoltage, short-circuit protection, and voltage fluctuation resistance, among other key parameters.
Environmental and Life Tests
To ensure sensor reliability under harsh environments, the standard specifies environmental test methods including low temperature, high temperature, temperature shock, constant damp heat, vibration, and free drop. After testing, requirements for appearance and flow detection error must be met. Additionally, there is a 168-hour high-temperature storage life test. All inspection methods reference relevant GB/T standards, with clear operational steps.
Inspection Rules
Inspection is divided into factory inspection and type inspection. Factory inspection uses counting sampling (GB/T 2828.1-2012, general inspection level II, AQL=2.5), covering items such as dimensions, appearance, operating current, and flow detection error. Type inspection covers all electrical characteristics, environmental tests, and life tests, conducted in groups with 10 samples per group. If non-conforming, corrective measures must be taken and re-inspection performed.
Comparison of Key Test Parameters
| Test Item | Requirement | Method |
|---|---|---|
| Operating Current | Comply with detailed specifications | Measure current at maximum flow using a series ammeter |
| Flow Detection Error | Comply with detailed specifications | Comparison with standard specimens |
| Response Time | Comply with detailed specifications | Detect output curve using an oscilloscope |
| Pressure Loss | Comply with detailed specifications | Pressure difference between inlet and outlet |
Significance and Application of the Standard
The implementation of this standard helps regulate the MEMS flow sensor market, improve product quality and interchangeability, and is particularly suitable for industrial gas monitoring, environmental measurement, and smart devices. When ordering, clearly specify the standard number, detailed specifications, quantity, and special requirements. The sensors are intended for gas mass flow measurement, with storage conditions of -10°C to 40°C and humidity not exceeding 80%.